New DLC
Technologies
S. Mikhailov1, C.Meunier2, S.Goloviatinski3,
E.Sheleg4, V.Sheleg5, C.Petit6
1 He-Arc, IMA, 17 Eplatures-Grise, 2300 La
Chaux-de-Fonds, Switzerland
2 FEMTO-ST, UMR 6174 CNRS, Université de
Franche-Comté, 4 place Tharradin, BP71427 25211 Montbéliard, France
3 Swissnanocoat SA, 17 Eplatures-Grise, 2300 La Chaux-de-Fonds, Switzerland
4 Creepservice Sarl, 22 Sentier du Ministre,
2014 Bôle, Switzerland
5 SZOS, 78 Kolasa, 231042 Smorgon, Belarus
6 Socrate Industrie Sarl, Zone Artisanale Dolines, 25500 Le Bélieu, France
By the choice of the excitation mode (laser, trigger) of the arc discharge,
and by using higher energy conditions (100eV / ion [1]), new carbon layers were
accomplished. These DLC layers present very interesting characteristics like
high smoothness (without droplets), hydrogen-free and low sp2 content
in the order of 25 %, estimated by XPS. Raman spectra show a very disordered
nature of the sp2 bonding and XRR measurements reveal high density
(up to 3). These layers display high hardness up to 80 GPa with an apparent
elastic modulus more than 600 GPa and a coefficient of friction about 0.12.
They exhibit an infrared transparency and a very good level of
biocompatibility.
Method for deposition of these particular DLC coatings consists of a
combination of processes:
PVD +CVD + low energy ion implantation. Three different sources are used: low energy ion gun for etching /
polishing / implantation for the surface preparation, filtered arc sources (x2) for metal deposition (with reactive gases) if a mechanical buffer
is needed for a good adhesion on substrates, and pulsed arc carbon source for
the DLC coatings deposition (with an adjustable filtering of macroparticles).
This high performance and cost efficient
technology enables to improve considerably service life time of micro tools,
needles, other components. Obtained DLC show an ultra low friction and increased
breakage resistance. They improve anticorrosion, anti-sticking and
biocompatibility characteristics. Surface temperature during the treatment is
low (<70°). Flexion tests with micro drills of 0.1mm diameter show >40% improves of a breakage resistance.
[1] Robertson J, Materials Science and Engineering: R: Reports, 37, 4-6, 24 2002,
129